Nano-indentation study on the (001) face of KDP crystal based on SPH methodOACSCDCSTPCD

作者：Guo Xiaoguang;Liu Ziyuan;Gao Hang;Guo Dongming

作者单位：Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, ChinaKey Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China

中文关键词：KDP crystal(001) facenano-indentationSPHnumerical simulation

英文关键词：KDP crystal(001) facenano-indentationSPHnumerical simulation

刊名：《半导体学报（英文版）》 2015 (8)

页码/页数：71-77,7

基金：Project supported by the National Basic Research Program of China (No.51135002),and the Science Fund for Creative Research Groups (No.51321004).

DOI：10.1088/1674-4926/36/8/083007