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纳米时栅传感器高精度激励信号源研究与设计

黄沛 郑方燕 冯济琴 陈自然

传感技术学报Issue(7):977-981,5.
传感技术学报Issue(7):977-981,5.DOI:10.3969/j.issn.1004-1699.2015.07.006

纳米时栅传感器高精度激励信号源研究与设计

Research and Design of High Precision Signal Source for Nanometer Time Grating Sensor

黄沛 1郑方燕 2冯济琴 1陈自然2

作者信息

  • 1. 重庆理工大学机械检测技术与装备教育部工程研究中心
  • 2. 时栅传感及先进检测技术重庆市重点实验室,重庆400054
  • 折叠

摘要

Abstract

Nanometer time grating makes measurement with moving reference frame constructed by alternating elec⁃tric field. Precision of the excitation directly affects the uniform motion of the reference frame,and thus influences the accuracy of measurement. In order to meet the requirement of high precision excitation,a new signal source adopting closed loop control was designed. FPGA was used to complete overall control,including acquisition con⁃trol,data processing and waveform data generating. Signal generating circuit and feedback circuit were constructed with 16-bit D/A and A/D converters,therefore the precise control of signals was improved a lot. The test results show that the precision of the signal amplitude is 0.01%and the phase precision is 0.1%,and the original precision of nanometer time grating was improved from 1.4μm to 0.9μm.

关键词

纳米测量/时栅/闭环控制/FPGA/信号源

Key words

nanometer measurement/time grating/closed loop control/FPGA/signal source

分类

信息技术与安全科学

引用本文复制引用

黄沛,郑方燕,冯济琴,陈自然..纳米时栅传感器高精度激励信号源研究与设计[J].传感技术学报,2015,(7):977-981,5.

基金项目

重庆市科委前沿与应用基础研究项目 ()

传感技术学报

OA北大核心CSCDCSTPCD

1004-1699

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