原子能科学技术Issue(8)：1509-1514,6.DOI:10.7538/yzk.2015.49.08.1509
类金刚石碳剥离膜的制备及其性能研究
Preparation and Property Investigation of Diamond-like Carbon Stripper Foil
摘要
Abstract
The diamond‐like carbon (DLC) stripper foils with 5‐7 μg/cm2 in thickness were produced by using the filtered cathodic vacuum arc (FCVA ) technology . The uniformity of the DLC stripper foils was measured by the XP2U balance .The results show that the maximum inhomongeneity of the DLC stripper foils in the range ofφ100 mm is less than 10% .The structures and properties of the DLC stripper foils were also evaluated and analyzed by scanning electron microscopy (SEM ) ,atom force micros‐copy (AFM ) , tribometer and X‐ray photoelectron spectroscopy (XPS ) . The SEM , AFM images and wear test results show that the DLC stripper foils are smooth and tense ,and contain hardly droplets through the double 90° filters .T he X‐ray photoelec‐tron spectrum indicates the sp3 bonds of the DLC stripper foils exceed 70% .Irradiation lifetimes and the DLC stripper foils with 5‐7 μg/cm2 were tested and compared with the 107 Ag - ,70 Ge- ,48 Ti- ,28 Si- ,197 Au- and 127 I- ion beams at the Beijing HI‐13 Tandem Accelerator .The results indicate that the lifetime of DLC stripper foil is 2.6‐10 times than that of the carbon stripper foil .关键词
类金刚石碳/剥离膜/磁过滤阴极真空弧/寿命/结构Key words
diamond-like carbon/stripper foil/filtered cathodic vacuum arc/lifetime/structure分类
数理科学引用本文复制引用
樊启文,杜英辉,张榕,夏清良..类金刚石碳剥离膜的制备及其性能研究[J].原子能科学技术,2015,(8):1509-1514,6.基金项目
国家自然科学基金资助项目 （）
