太原理工大学学报Issue(5)：587-591,5.DOI:10.16355/j.cnki.issn1007-9432tyut.2015.05.021
基于光栅尺反馈的高精度步进电机位移台系统开发
The Exploitation of High Accuracy Stepper Motor Stage System Based on Grating Feedback
王国林 1殷旻1
作者信息
- 1. 江苏大学汽车与交通工程学院，江苏镇江 212013
- 折叠
摘要
Abstract
A control system was developed ,which uses stepper motor stage as actuator ,grat‐ing as feedback element .This system improves the stage’s accuracy by using personal computer (PC) program and grating feedback and realizes the Proportion Integration Differentiation (PID) control over the stage’s displacement without changing the screw machining accuracy and the sig‐nal transmission quality .The system reduces the absolute error from 0.5 mm to 0.005 mm in the w hole stroke .T he error range achieves the system accuracy requirements .关键词
步进电机位移台/光栅尺/PID控制/误差补偿Key words
stepper motor stage/grating/proportion integration differentiation control/error compensation分类
信息技术与安全科学引用本文复制引用
王国林,殷旻..基于光栅尺反馈的高精度步进电机位移台系统开发[J].太原理工大学学报,2015,(5):587-591,5.
