传感技术学报Issue(8)：1120-1124,5.DOI:10.3969/j.issn.1004-1699.2015.08.004
电热驱动Bimorph微执行器对流系数估算方法研究
A Studyon the Convection Coefficient of an Electro-Thermal Bimorph Actuator
刘骏文 1徐大诚 2陈巧 1丁金玲 3谢会开3
作者信息
- 1. 苏州大学电子信息学院，江苏苏州215000
- 2. 无锡微奥科技有限公司，江苏无锡214000
- 3. 无锡微奥科技有限公司，江苏无锡214000
- 折叠
摘要
Abstract
A method of estimating the convection coefficient at microscale is presented in this paper,based on the modeling and experimental data of a microfabricated electrothermal bimorph actuator. In this method,an analytical heat transfer model of the electro-thermal bimorph actuator is established first. Then the model is used to analyze the temperature distribution and extract the convection coefficient from measurement data. The convection coefficient obtained by this method matches the experimental result within 8.1%,which validates the rationality of this method.关键词
对流系数/电热Bimorph结构/微执行器/热阻模型Key words
convection coefficient/electro-thermal Bimorph/micro-actuator/thermal resistance model分类
信息技术与安全科学引用本文复制引用
刘骏文,徐大诚,陈巧,丁金玲,谢会开..电热驱动Bimorph微执行器对流系数估算方法研究[J].传感技术学报,2015,(8):1120-1124,5.
