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Impact of continuing scaling on the device performance of 3D cylindrical junction-less charge trapping memory

Li Xinkai Huo Zongliang Jin Lei Jiang Dandan Hong Peizhen Xu Qiang Tang Zhaoyun

半导体学报(英文版)2015,Vol.36Issue(9):79-84,6.
半导体学报(英文版)2015,Vol.36Issue(9):79-84,6.DOI:10.1088/1674-4926/36/9/094008

Impact of continuing scaling on the device performance of 3D cylindrical junction-less charge trapping memory

Impact of continuing scaling on the device performance of 3D cylindrical junction-less charge trapping memory

Li Xinkai 1Huo Zongliang 1Jin Lei 1Jiang Dandan 1Hong Peizhen 1Xu Qiang 1Tang Zhaoyun1

作者信息

  • 1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 折叠

摘要

关键词

3D charge trapping devices/vertical charge loss/lateral charge migration/semiconductor device simulation

Key words

3D charge trapping devices/vertical charge loss/lateral charge migration/semiconductor device simulation

引用本文复制引用

Li Xinkai,Huo Zongliang,Jin Lei,Jiang Dandan,Hong Peizhen,Xu Qiang,Tang Zhaoyun..Impact of continuing scaling on the device performance of 3D cylindrical junction-less charge trapping memory[J].半导体学报(英文版),2015,36(9):79-84,6.

基金项目

Project supported by the National Natural Science Foundation of China (Nos.61474137,61176073,61306107). (Nos.61474137,61176073,61306107)

半导体学报(英文版)

OACSCDCSTPCDEI

1674-4926

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