电子科技大学学报Issue(5)：778-783,6.DOI:10.3969/j.issn.1001-0548.2015.05.023
BaxSr1-xTiO3微弧氧化铁电薄膜微观结构及电学性能
Microstructure and Electrical Property of BaxSr1-xTiO3 Ferroelectric Thin Film Prepared by Microarc Oxidation
摘要
Abstract
BaxSr(1−x)TiO3 (BST) thin film was fabricated by microarc Oxidation (MAO) in an aqueous solution containing barium hydroxide and strontium hydroxide. The influence of the ratio of Ba2+/Sr2+ was studied on the crystalline structure, phase composition and morphology of the BST film. It is found that the BST films are composed mainly of tetragonal BaxSr(1−x)TiO3, in which Ba2+ ions are more easily incorporated than Sr2+ions. The BST films are getting rougher with the increase of the electrolyte concentration and the ratio of Ba2+/Sr2+. The BST film has the smoothest and densest surface when prepared by using an optimized solution containing 0.2 mol/L Ba(OH)2and 0.2 mol/L Sr (OH)2, which possesses high dielectric constant of 454.8 at the frequency of 100 Hz and exhibits a saturated electric hysteresis loop, thus showing a potential commercial application.关键词
BaxSr(1-x)TiO3/电学性能/铁电薄膜/微弧氧化/微观结构Key words
barium strontium titanate/electrical properties/ferroelectric film/micro-arc oxidation/microstructure分类
通用工业技术引用本文复制引用
王敏,李文芳,张果戈,王晓军,唐鹏..BaxSr1-xTiO3微弧氧化铁电薄膜微观结构及电学性能[J].电子科技大学学报,2015,(5):778-783,6.基金项目
广东省自然科学基金(S2013010015211)；中央高校基本科研业务费专项资金(2012ZZ0011)；广西自然科学基金(2012GXNSFBA053143)；广西大学有色金属及材料加工新技术教育部重点实验室开放基金(GXKFJ09-10) （S2013010015211）
