强激光与粒子束Issue(10)：1-5,5.DOI:10.11884/HPLPB201426.102004
热处理对CH薄膜表面粗糙度及力学性能的影响
Effect of heat treatment on the surface and mechanical properties of CH films
贾晓琴 1何智兵 2何小珊 1韦建军 1杜凯 3刘浩1
作者信息
- 1. 中国工程物理研究院 激光聚变研究中心，四川 绵阳 621900
- 2. 四川大学 原子与分子物理研究所，成都 610065
- 3. 四川大学 原子与分子物理研究所，成都 610065
- 折叠
摘要
Abstract
The glow discharge polymer (GDP)films with the thickness of about 7μm were deposited.Under the protection of argon,the GDP films were heated to 300 ℃ for 6 h,10 h,24 h.The influence of holding time on the structure of GDP films was characterized by FT-IR.The surface roughness of GDP films after different holding time was investigated by white light in-terferometer.The hardness and modulus of GDP films were measured by nanoindentation.It is found that while the holding time increases,the relative content of CH3 decreases,the cross-linking degree of carbon network increases,and the surface roughness of GDP films reduces.The hardness and moludus decreases firstly and then increases with the increaseing holding time.关键词
辉光放电聚合物/热处理/表面粗糙度/力学性能Key words
glow discharge polymer/heat treament/surface roughness/mechanical properties分类
社会科学引用本文复制引用
贾晓琴,何智兵,何小珊,韦建军,杜凯,刘浩..热处理对CH薄膜表面粗糙度及力学性能的影响[J].强激光与粒子束,2014,(10):1-5,5.
