物理学报Issue(9)：1-8,8.DOI:10.7498/aps.63.098103
外加磁场对射频磁控溅射制备铝掺杂氧化锌薄膜影响的研究
Influence of external magnetic field on prop erties of aluminum-dop ed zinc oxide films prepared by RF magnetron sputtering
摘要
Abstract
Al-doped ZnO (AZO) transparent conductive oxide films were prepared by RF magnetic sputtering. An external magnetic field was applied to the traditional magnetron sputtering system. The influence of the external magnetic field on the crystalline structure, surface topography and photoelectric properties of the AZO transparent conductive film have been studied. XRD diffraction patterns show that under the same processing condition, the intensity of (002) diffraction peak is significantly increased with the external magnetic field, suggesting a higher degree of c-axis preferred orientation. Scanning electron microscope shows that the external magnetic field can enlarge the grain size and density of films;the surface topography of the AZO films deposited without an external magnetic field is wormlike. Deposition rate and square resistance test results show that in an external magnetic field, the deposition rate will increase from 13.04 nm/min to 19.93 nm/min, and the sheet resistance reduce to 12.88Ω/□ from 30.74Ω/□ at a sputtering time of 90 min. Optical transmittance spectra shows that the average transmittance of all the films in visible light spectrum is over 85% when the sputtering time is not more than 60 min, while the external magnetic field has little effect on the transmittance of the films, but making a larger blue shift of the absorption edge. Ansys software is used to simulate the two-dimensional magnetic field distribution above the target. Results show that the intensity of the horizontal magnetic field and the uniformity of it are improved by the external magnetic field, the secondary electrons near the target are tightly bound, leading to a much larger target current intensity. So the deposition rate, surface topography and photoelectric properties of the AZO films are improved.关键词
外加磁场/磁控溅射/AZO/透明导电薄膜Key words
external magnetic field/magnetron sputtering/AZO/transparent conductive oxide films引用本文复制引用
陈明,周细应,毛秀娟,邵佳佳,杨国良..外加磁场对射频磁控溅射制备铝掺杂氧化锌薄膜影响的研究[J].物理学报,2014,(9):1-8,8.基金项目
上海工程技术大学研究生创新项目(批准号:13KY0508)和上海高校一流学科建设计划(批准号：YLJX12-2)资助的课题 （批准号:13KY0508）
