物理学报Issue(24)：1-12,12.DOI:10.7498/aps.63.248103
化学气相沉积法制备大尺寸单晶石墨烯的工艺参数研究∗
Pro cess parameters of large single crystal graphene prepared by chemical vap or dep osition
摘要
Abstract
Graphene, as a two-dimensional sp2 hybridization allotropicity of carbon element, possesses unique properties of electricity, photology, thermology and mechanics. For industrialization, graphene possessing large dimension and homogeneous property is required. It can be prepared by chemical vapor deposition technology. In this paper, based on the progress of graphene research this year, we summarize the influence factors of graphene preparation, including substrate selection and preprocessing, carbon source and assist gas flow control, chamber temperature, pressure control, cooling rate, and deposition time setting, etc. Finally, we outlook the research direction of preparing the large-dimensional and single crystal graphenes.关键词
石墨烯/化学气相沉积法/工艺参数/大尺寸Key words
graphene/chemical vapor deposition/process parameter/large dimension引用本文复制引用
韩林芷,赵占霞,马忠权..化学气相沉积法制备大尺寸单晶石墨烯的工艺参数研究∗[J].物理学报,2014,(24):1-12,12.基金项目
国家自然科学基金(批准号:61274067,60876045)资助的课题.@@@@* Project supported by the National Natural Science Foundation of China (Grant Nos.61274067,60876045) （批准号:61274067,60876045）
