物理学报Issue(1):1-8,8.DOI:10.7498/aps.64.018102
金刚石表面无定形碳氢薄膜生长的分子动力学模拟∗
Molecular dynamics simulations on the growth of thin amorphous hydrogenated carb on films on diamond surface
摘要
Abstract
The growth of thin amorphous hydrogenated carbon films (a-C:H) on diamond (111) surface from the bombardment of CH2 radicals is studied using molecular dynamics simulations. Structural analysis shows that the local structure (e.g., the first coordination number of C atoms) of a-C:H depends critically on the content of hydrogen. The increase in kinetic energy of incident radicals leads to the decrease of hydrogen content, which subsequently changes the proportion of sp3 bonded C atoms in a-C:H.关键词
无定形碳氢薄膜/金刚石表面/分子动力学模拟Key words
amorphous hydrogenated carbon films/diamond (111) surface/molecular dynamics simula-tions引用本文复制引用
张传国,杨勇,郝汀,张铭..金刚石表面无定形碳氢薄膜生长的分子动力学模拟∗[J].物理学报,2015,(1):1-8,8.基金项目
国家重大专项与北京工业大学先进技术基金资助的课题.* Project supported by the National Major Project and Advance Technology Fund of Beijing University of Technology ()