光子传感器：英文版2015，Vol.5Issue(3)：P.202-210,9.
Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor
K. J. SUJA Rama KOMARAGIRI1
作者信息
- 1. Department of ECE, National Institute of Technology, Calicut, India
- 折叠
摘要
关键词
Micro electro mechanical system （MEMS）/finite element analysis （FEA）/stacked diaphragm,sensitivity分类
信息技术与安全科学引用本文复制引用
K. J. SUJA Rama KOMARAGIRI..Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor[J].光子传感器：英文版,2015,5(3):P.202-210,9.
