表面技术Issue(10)：63-67,85,6.DOI:10.16490/j.cnki.issn.1001-3660.2015.10.011
基于缝式喷嘴的高硅钢渗硅速率实验研究
Experimental Research of Silicon Steel Penetration Rate Based on the Slot Nozzle
王清 1陈建钧 1相颖杰 1厚康 1何丹1
作者信息
- 1. 华东理工大学 机械与动力工程学院，上海200237
- 折叠
摘要
Abstract
Objective To investigate the influence of the SiCl4 and N2 mixture ejection parameter by using a slot nozzle on the siliconizing rate during the preparation of 6. 5%Si steel by CVD method. Methods The siliconizing experiment was conducted at different reaction temperatures, volume fractions of SiCl4 gas, and mixture gas flows. The impact of these factors on the siliconizing rate was analyzed by scanning electron microscope, energy spectrum analysis and weightlessness ratio analysis. And the comparison of siliconizing rates under ejection by slot nozzle and uniform atmosphere was conducted. Results The siliconizing rate was signifi-cantly improved by the application of slot nozzle. The siliconizing rate continuously increased with increasing temperature. After the temperature reached 1100 ℃, the siliconizing rate tended to saturate and did not show obvious change with further increase of the temperature. And the siliconizing rate increased firstly and then gradually decreased with the increase of SiCl4 concentrations and mixture gas flows, when the concentration of SiCl4 was 15%, the siliconizing rate reached the maximum; when the gas flow rate was 1 L/min, the siliconizing rate reached the peak value. Conclusions There was a great advantage by using slot nozzle to inject reaction gas in the preparation of 6. 5%Si steel with CVD method. Moreover, the siliconizing rate was the highest when the reaction temperature was 1170 ℃, SiCl4 gas volume fraction was 15%, and gas mixture flow was 1 L/min.关键词
缝式喷嘴/高硅钢/渗硅速率/反应温度/SiCl4 气体浓度/气体流量Key words
slot nozzle/high silicon steel (6. 5%Si)/siliconizing rate/reaction temperature/concent fraction of SiCl4/gas flow分类
矿业与冶金引用本文复制引用
王清,陈建钧,相颖杰,厚康,何丹..基于缝式喷嘴的高硅钢渗硅速率实验研究[J].表面技术,2015,(10):63-67,85,6.
