电子学报Issue(10)：2095-2109,15.DOI:10.3969/j.issn.0372-2112.2015.10.032
基于 MEMS 技术的智能传感器系统（“智能灰尘”）
MEMS-Based Smart Sensing System (“Smart Dust”)
摘要
Abstract
MEMS-based smart sensing system (“Smart Dust”)with ultra small size and low power consumption is integrated by multi-functional sensors including information detection,process and interexchange,it also contains the composite energy system with energy harvesting system and power management programs.Such device therefore is able to work either autonomously or col-laboratively.This paper is to clarify fundamentals and applications of smart dust technology,followed by its architecture design of such device.And then,focus will be given on several critical issues and technical difficulties by the development trajectory and inter-related technologies of smart dust.Finally,the feasibility to achieve such integrated multi-function sensing system with MEMS manu-factory engineering techniques will be addressed.关键词
MEMS (micro electro mechanical systems)/智能灰尘/无线通信/复合能源Key words
MEMS(micro electro mechanical systems)/smart dust/composite energy/information process分类
信息技术与安全科学引用本文复制引用
张紫辰,董恺琛,张益源,王建中,赵嘉昊,尤政..基于 MEMS 技术的智能传感器系统（“智能灰尘”）[J].电子学报,2015,(10):2095-2109,15.基金项目
博士后基金资助（No．2013M530613）；清华大学自主科研项目（No．20121087915）；国家高技术研究发展计划 （）
