发光学报2015，Vol.36Issue(11)：1300-1306,7.DOI:10.3788/fgxb20153611.1300
用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜
Preparation of AZO/Ag/AZO Transparent Conductive Films Deposited on Glass and Polyimide Substrates Using Powder Targets
摘要
Abstract
The sandwich films composed of aluminum ions doped zinc oxide ( AZO)/silver( Ag)/AZO films were prepared on polyimide ( PI) and glass substrates by RF magnetron sputtering using the powder AZO target and the solid Ag target at room temperature. The effect of the thicknesses of AZO layers on the structure, optical and electrical properties of the sandwich films was investigated. The results show that the as-deposited films are polycrystalline on both PI and glass substrates. The changes of the electrical properties of the sandwich films are not obvious, and the positions of the highest transmittance shift towards the long wavelength region with the increasing of AZO thickness. When the thicknesses of the films are 30 nm of AZO and 14 nm of Ag, the sheet resistances are as low as 2. 6 Ω/□ and 4. 6 Ω/□on glass and PI substrates, respectively. The transmittances of the films at 550 nm are 85% on glass and 70% on PI substrates.关键词
粉末靶/有机衬底/多层透明导电薄膜/磁控溅射Key words
powder target/organic substrate/TCO multilayer film/magnetron sputtering分类
数理科学引用本文复制引用
刘思宁,周艳文,沙天怡..用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜[J].发光学报,2015,36(11):1300-1306,7.基金项目
国家自然科学基金(51172101,51372109) （51172101,51372109）
辽宁省高等学校优秀人才支持计划(LR2012009)资助项目 （LR2012009）
