发光学报Issue(12)：1427-1433,7.DOI:10.3788/fgxb20153612.1427
粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能
Optical and Electrical Properties of AZO/Ag/AZO Transparent Conductive Films Prepared by RF Magnetron Sputtering Using Powder Targets
摘要
Abstract
The sandwich films composed of aluminum doped zinc oxide ( AZO)/silver ( Ag)/alumi-num doped zinc oxide ( AZO) layers were prepared on glass substrates by RF magnetron sputtering using AZO powder target and solid Ag target at room temperature. Two groups of AZO/Ag/AZO films were deposited with Ag thickness of 12 nm and 15 nm. The optical and electrical properties of the sandwich films were investigated. The results show that the average transmittance of the films are about 80% within the visible wavelength, and the highest transmittance is 88% at 550 nm. The sheet resistances of the multilayer films are lower than 5 Ω/□. The thickness of Ag layer is the main factor to affect the optical and electrical properties of AZO/Ag/AZO films. The thickness of AZO layer has a certain effect on the optical properties of the sandwich films.关键词
多层透明导电薄膜/金属基透明导电薄膜/粉末靶/射频磁控溅射Key words
TCO multilayer films/metal matrix TCO films/powder target/RF magnetron sputtering分类
数理科学引用本文复制引用
刘思宁,周艳文,吴川,吴法宇..粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能[J].发光学报,2015,(12):1427-1433,7.基金项目
国家自然科学基金 （）
辽宁省高等学校优秀人才支持计划（LR2012009）资助项目 （）
