化工学报Issue(10)：4115-4122,8.DOI:10.11949/j.issn.0438-1157.20150132
流体微通道浸泡蚀刻技术实验
Experiment on immersion chemical etching technology of fluid micro-channels
摘要
Abstract
As a new type of modern manufacturing technologies, micro-fabrication technology comes into being with the emergence of micro-manufacturing, which realizes the machining and assembly in micro size. The chemical etching technology is one of the major processing methods for micro-fabrication technology, which includes immersing, bubbling, spraying and so on. Among them the equipment of immersion etching is simple, easy to operate and relatively low-cost. In this study, the influence of etching time, concentration of the etching liquid composition, etching temperature and other factors on the chemical etching is mainly studied by using single factor immersion method. The results show that FeCl3 concentration, H3PO4 concentration in the etching liquid, etching temperature and others heavily affected the etching rate, etching uniformity, lateral erosion and surface roughness. It provides elementary process parameters for the micro-manufacturing.关键词
微制造/不锈钢板/化学反应/蚀刻溶液/蚀刻质量/表面形貌/测量Key words
micro-manufacturing/stainless steel/chemical reaction/etching solution/etching quality/surface appearance/measurement分类
矿业与冶金引用本文复制引用
辛菲,李磊,王秋旺..流体微通道浸泡蚀刻技术实验[J].化工学报,2015,(10):4115-4122,8.基金项目
国家自然科学基金国际（地区）合作与交流项目（51120165002）。@@@@supported by the International Cooperation and Exchanges Project of NSFC of China (51120165002) （51120165002）
