华中科技大学学报（自然科学版）Issue(z1)：505-508,4.DOI:10.13245/j.hust.15S1120
基于柔性铰链的压电微夹钳设计
Design and analysis on piezoelectric micro-gripper based on flexible hinge
摘要
Abstract
A piezoelectric microgripper was proposed for micro-electro-mechanical system (MEMS) micro assembly.The micro-gripper based on flexible hinge was driven by piezoelectric ceramic stack, which has two levels of displacement amplification mechanism with symmetric structure.Theoretical analysis had being focused on the micro-gripper-zoom feature and the IO (input output)model of volt-age and decomposable tensor was built.Experimental results show that when the driving voltage is 140 V,and the gripper has a maximum decomposable tensor capacity of about 1 260 μm.The micro-operation practice shows that micro-gripper can achieve tiny device clamping operation for different shapes sizes from 50 μm to 1 260 μm range.关键词
微装配/微夹钳/柔性铰链/压电陶瓷/缩放特性/理论分析Key words
micro assembly/micro-gripper/flexible hinge/PZT (piezoelectric ceramic transducer)/zoom feature/theoretical analysis分类
信息技术与安全科学引用本文复制引用
肖乾亮,陈国良,罗春..基于柔性铰链的压电微夹钳设计[J].华中科技大学学报（自然科学版）,2015,(z1):505-508,4.基金项目
国家自然科学基金资助项目（61373110）；武汉市科技攻关项目（2014010101010005）． （）
