激光技术Issue(4)：478-482,5.DOI:10.7510/jgjs.issn.1001-3806.2013.04.014
超短激光脉冲序列烧蚀镍薄膜的研究
Study on ablation of Ni film by ultrashort laser pulse-train
摘要
Abstract
Micromaching by ultrashort laser pulse-train can effectively improve femtosecond laser ablation of metal , which are important both theoretically and practically in micro /nano-laser fabrication applications.In order to study the effect of separation of pulse on the accuracy of laser ablation , the phenomena and process of laser ablation with different separation of pulse train were studied in detail by combining the molecular dynamic simulation and two -temperature model, the electron and lattice temperatures of the layers next to dynamic film surfaces and the snapshots of nickel thin films irradiated by the femtosecond laser pulse trains were obtained .The result is that ,within a certain range, as the increase of the separation of pulse, femtosecond pulse train laser ablation of Ni films can apparently cause more flat ablation plane , slower initial melting speed, smaller and more uniform nanoparticles , smaller ablation ratio,which can effectively improve femtosecond laser ablation of metal .关键词
激光技术/脉冲序列/飞秒激光/双温模型/分子动力学/脉冲间隔Key words
laser technique/pulse train/femtosecond laser/two-temperature model/molecular dynamics/separation of pulse分类
通用工业技术引用本文复制引用
韩飞,闫寒,周海波,王琼娥..超短激光脉冲序列烧蚀镍薄膜的研究[J].激光技术,2013,(4):478-482,5.
