激光技术Issue(6)：765-768,4.DOI:10.7510/jgjs.issn.1001-3806.2015.06.007
纳秒和飞秒激光烧蚀单晶硅的超快诊断
Ultra-fast diagnosis of monocrystalline silicon ablated by ns and fs laser
摘要
Abstract
In order to study ultrafast dynamics of high power laser ablation of silica , the dynamic process of monocrystalline silicon ablated by nanosecond ( ns ) and femtosecond ( fs ) laser was investigated by the technology of ultrafast time-resolved optical diagnosis .The time-resolved shadowgraphs of the formation and evolution process of plasma expansion , material ejection and shock waves were obtained .For ns laser, material ejection occurs at 200ns ~300ns of delay time with gas-liquid mixture and at 1060ns of delay time with droplet ejection .For fs laser, material ejection occurs at 1ns~2ns of delay time with plasma .The result shows that the dynamic process of laser ablation is significantly different between by fs laser and by ns laser , especially the time of material ejection and the state and size of ejection particles .The results indicate that the process of material ejection induced by ns and fs laser is discontinuous and show that the material ejection is caused by different ablation mechanisms in different time.The results are helpful for the study of interaction mechanism of laser and silica , as well as laser etching monocrystalline silicon .关键词
超快光学/物质喷发/超快诊断/冲击波/等离子体Key words
ultrafast optics/material ejection/ultrafast diagnostic/shock wave/plasma分类
数理科学引用本文复制引用
田润妮,王俊波,邱荣,周强,蒋勇,杨永佳..纳秒和飞秒激光烧蚀单晶硅的超快诊断[J].激光技术,2015,(6):765-768,4.基金项目
国家自然科学基金-中国工程物理研究院联合基金资助项目 （）
