机电工程技术Issue(10)：123-124,2.DOI:10.3969/j.issn.1009-9492.2015.10.031
激光干涉仪在平面度检测中的应用
Appliance of the Laser Interferometer in Flatness Testing
钟赖 1司卫征 1郭文波1
作者信息
- 1. 广州计量检测技术研究院，广东广州 510030
- 折叠
摘要
Abstract
The advantage of the laser and electronic level which are used to measure flatness of plane with rectangle method and diagonal method is compared and analyzed. The result shows that the laser has the advantages of high precision, intuitive on flatness measurement.关键词
激光干涉仪/平面度/电子水平仪/高精度Key words
laser interferometer/flatness/electronic level/high precision分类
机械制造引用本文复制引用
钟赖,司卫征,郭文波..激光干涉仪在平面度检测中的应用[J].机电工程技术,2015,(10):123-124,2.
