物理学报Issue(11)：350-357,8.DOI:10.7498/aps.62.115202
电负性气体的掺入对容性耦合Ar等离子体的影响*
Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas*
摘要
Abstract
Investigation of electronegative plasmas has now been atrractive due to the advantages of negative-ion assisted etching and charge-free ion implantation in semiconductor manufacture. Langmuir electrostatic probe, as a simple, inexpensive and good spatial resolution diagnosic tool, is popularly used in investigating electronegative plasmas. In this paper, the Langmuir electrostatic probe is proposed to measure the capacitively coupled Ar plasmas with added electronegative gases, such as O2, Cl2 and SF6. The experimental results from the measurements of Ar plasmas with added electronegative gases driven by a 40.68 MHz field indicate that, with increasing flow rate of electronegative gas, high energy peak will occur in electron energy possibility function and shift towards higher energyside. The addition of electronegative gases reduces the electron density significantly as the electron temperature increases. We also calculate the electronegativity of Ar plasmas for the three kinds of electronegative gases. The preliminary interpretations of the above experimental phenomena are presented.关键词
电负性等离子体/电子密度/电子温度/电负度Key words
electronegative plasma/electron density/electron temperature/electronegativity引用本文复制引用
洪布双,苑涛,邹帅,唐中华,徐东升,虞一青,王栩生,辛煜†..电负性气体的掺入对容性耦合Ar等离子体的影响*[J].物理学报,2013,(11):350-357,8.基金项目
国家自然科学基金(批准号:11175127)资助的课题. （批准号:11175127）
@@@@*Project supported by the National Natural Science Foundation of China (Grant No.11175127) （Grant No.11175127）
