物理学报Issue(11)：358-364,7.DOI:10.7498/aps.62.115203
流体-亚稳态原子传输混合模型模拟空心阴极放电特性*
Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms*
摘要
Abstract
The characteristics of rectangular hollow cathode discharge are studied based on a fluid model combined with a transport model for metastable Ar atoms in argon. The distribution of potential, density of electrons and ions, and the density of metastable atoms are calculated at a pressure of 10 Torr. The peak density of electron and ion is 4.7×1012 cm−3, and the peak density of metastable atoms is 2.1 × 1013 cm−3. Results obtained in terms of fluid-metastable hybrid model are compared with that in terms of the fluid model, which show that the electron produced by stepwise ionization is one of the important source of new electrons, and the metastable atoms have an obvious effect on the hollow cathode discharge. Compared with the results calculated in terms of fluid model, the density of electrons obtained in terms of hybrid model increases, and the depth of cathode sheath and the averaged electron energy decrease.关键词
空心阴极放电/流体-亚稳态原子传输模型/电子密度/分步电离Key words
hollow cathode discharge/fluid-metastable atoms transport model/density of electrons/stepwise ion-ization引用本文复制引用
何寿杰†,哈静,刘志强,欧阳吉庭,何锋..流体-亚稳态原子传输混合模型模拟空心阴极放电特性*[J].物理学报,2013,(11):358-364,7.基金项目
国家自然科学基金(批准号:11205046 （）
11005009 （）
51077035),河北省高等学校科学研究(批准号:2011166)和河北省自然科学基金项目(批准号:A2012201037)资助的课题. （批准号:2011166）
@@@@*Project supported by the National Natural Science Foundation of China (Grant Nos.11205046,11005009,51077035), the Science and Technology Research Projects of Colleges and Universities in Hebei Province (Grant No.2011166), and the Science Foundation of Hebei province, China (Grant No. A2012201037) （Grant Nos.11205046,11005009,51077035）
