物理学报Issue(16)：1-5,5.DOI:10.7498/aps.62.165204
高气压直流辉光CH4/H2等离子体的气相过程诊断*
A diagnosis of gas-phase processes in a high pressure DC CH4/H2 plasma*
摘要
Abstract
In this work, gas phase processes in a high pressure (∼100 Torr) DC hydrocarbon plasma are investigated in situ by optical emission spectroscopy and mass spectroscopy. In the high pressure plasma, optical emission characteristics of glow layers are obviously different. C2, CH dominated band spectra and discrete spectra are distinctively observed in the positive column, whereas the emission intensity is found to decrease in the anode region. In the cathode region, a large number of complicated spectra are detected, which indicates the intensive interaction between the cathode and plasma under high pressure induces complicated atomic and molecular processes. With the the increase of pressure, electron excitation temperature decreases while gas rotational temperature goes up. High methane concentration causes increases in C2, C2H2 and C2H4 but a reduction in C2H6. Those suggest that the effect of gas temperature on gas phase process is significantly enhanced under high pressure.关键词
高气压直流等离子体/光发射谱/质谱Key words
high pressure DC plasma/optical emission spectroscopy/mass spectroscopy引用本文复制引用
郑仕健,丁芳,谢新华,汤中亮,张一川,李唤,杨宽,朱晓东..高气压直流辉光CH4/H2等离子体的气相过程诊断*[J].物理学报,2013,(16):1-5,5.基金项目
国家自然科学基金(批准号:11075158)和国家自然科学基金国家基础科学人才培养基金(批准号:J1103207)资助的课题.*Project supported by the National Natural Science Foundation of China (Grant No.11075158) and the Fund for Fostering Talents in Basic Science of the National Natural Science Foundation of China (Grant No. J1103207) （批准号:11075158）
