现代电子技术Issue(12)：18-20,24,4.
一种硅压阻式压力传感器温度补偿算法及软件实现
A temperature compensation algorithm of piezoresistive pressure sensor and software implementation
刘永涛 1徐大诚 1郭述文1
作者信息
- 1. 苏州大学 微纳传感器研究中心，江苏 苏州 215100
- 折叠
摘要
Abstract
The thermal zero drift and thermal sensitivity drift of piezoresistive pressure sensor are the main factors of affec⁃ting the performance of sensors,so how to effectively compensate this kind of error to improve its performanc is significative. It’s an effective method to establish higher⁃order temperature compensation model of silicon piezoresistive prossure sensors and com⁃pensate temperature error. A fitting coefficient calculation method is put forward on the basis of this model. The calculation of temperature compensation was realized with Matlab GUI,and then the dynamic temperature compensation of the sensor output was realized. The good output linearity performance was achieved. The experimental results show that the nonlinearity error of compensated sensor output is less than 0.5%.关键词
硅压阻式压力传感器/温度补偿系数/温度补偿算法/温度补偿模型Key words
piezoresistive pressure sensor/temperature compensation coefficient/temperature compensation algorithm/temperature compensation model分类
信息技术与安全科学引用本文复制引用
刘永涛,徐大诚,郭述文..一种硅压阻式压力传感器温度补偿算法及软件实现[J].现代电子技术,2013,(12):18-20,24,4.
