太赫兹科学与电子信息学报Issue(4)：527-530,4.DOI:10.11805/TKYDA201304.0527
采用UV-LIGA技术制作340 GHz折叠波导慢波结构
Microfabrication of 340 GHz Folded Waveguide Slow Wave Structure using UV-LIGA Technology
李含雁 1白国栋 1李兴辉 1唐烨 1冯进军1
作者信息
- 1. 中国电子科技集团公司第 12研究所，北京 100015
- 折叠
摘要
Abstract
Ultraviolet Lithographie , Galvanoformung and Abformung(UV-LIGA) is an attractive technique to fabricate THz vacuum electron devices including resonance cavities,electron beam tunnels and output waveguides. This paper studies the effects of the softbake,the exposure dosage and the postbake on SU8 models,highlighting the effect of the exposure dosage and its mechanics,and then obtains the optimized process parameters. The methods of SU8 removal are studied as well,and a 340 GHz all-copper Folded Waveguide(FWG) Slow Wave Structure(SWS) is fabricated.关键词
紫外光刻/电铸和注塑技术/SU8胶模/曝光量/340 GHz折叠波导Key words
Ultraviolet Lithographie,Galvanoformung and Abformung technique/SU8/exposure dosage/340 GHz Folded Waveguide分类
信息技术与安全科学引用本文复制引用
李含雁,白国栋,李兴辉,唐烨,冯进军..采用UV-LIGA技术制作340 GHz折叠波导慢波结构[J].太赫兹科学与电子信息学报,2013,(4):527-530,4.
