噪声与振动控制Issue(5)：39-42,4.DOI:10.3969/j.issn.1006-1335.2015.05.007
微机械谐振器可变锚点结构能量耗散特性分析
Energy Dissipation Analysis of Micromechanical Resonators with Variable Anchor Structures
摘要
Abstract
Energy dissipation of micromechanical resonators is always inevitable in vibration process. There are several energy dissipation mechanisms, such as air damping dissipation, thermo-elastic damping dissipation, anchor loss, surface dissipation and so on. Of them, anchor loss is the main energy dissipation mechanism. In this paper, the perfectly matched layers method was adopted to transform the incident wave absorption problem in infinite domain into that in finite domain. Two different anchor structures of centrally-supported bulk-mode disk resonator were designed. And the influence of the geometrical changes of the structure on the inherent frequencies and anchor loss quality factor of the bulk mode disk resonator was discussed. The results show that the anchor loss quality factor can be greatly improved and the energy utilization efficiency can be raised by changing the anchor structure of the resonator.关键词
振动与波/微机械谐振器/锚点耗散/完美匹配层/结构优化Key words
vibration and wave/micromechanical resonator/anchor loss/perfectly matched layers/structure optimization分类
通用工业技术引用本文复制引用
张厦,张文明..微机械谐振器可变锚点结构能量耗散特性分析[J].噪声与振动控制,2015,(5):39-42,4.基金项目
国家自然科学基金项目（11322215）；霍英东青年教师基金项目 （）
