计算机工程与应用2016，Vol.52Issue(1)：244-249,6.DOI:10.3778/j.issn.1002-8331.1401-0148
无模型自适应模糊算法的多晶硅棒温度控制
Model free adaptive fuzzy control of temperature of silicon rod in reduction
摘要
Abstract
Temperature control of the silicon rod surface in the reduction furnace of polycrystalline silicon requires that the surface temperature of the silicon rod has to be maintained at the optimal reaction temperature and the fluctuation should not be violent. Due to the change of the electrical structure of the silicon rod as a result of the vapor deposition reaction in the production of polycrystalline silicon, there exists the characters of interconnection and nonlinear. This paper adopts the double closed-loop control system with model-free adaptive fuzzy controller as the major controller and PI as the aux-iliary controller. It uses the structure of model-free adaptive controller and carries out on-line revision of its parameters by means of fuzzy rules, which not only ensures the convergence and stability of the temperature control system, but also enhances the rapid dynamic performance of the system toward temperature control. The simulations show the availability of this control method.关键词
无模型自适应/模糊控制/参数自整定/硅棒温度Key words
model-free adaptive/fuzzy control system/parameter self-tuning/silicon rod temperature分类
信息技术与安全科学引用本文复制引用
谢宏,陈俊辉,陈海滨,邹高亮,杨鹏,谭阳红,何怡刚..无模型自适应模糊算法的多晶硅棒温度控制[J].计算机工程与应用,2016,52(1):244-249,6.基金项目
国家自然科学基金(No.61102039,No.60876022). （No.61102039,No.60876022）
