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Surface acoustic wave devices for sensor applications

Liu Bo Chen Xiao Cai Hualin Mohammad Ali Mohammad Tian Xiangguang Tao Luqi Yang Yi

半导体学报（英文版）2016，Vol.37Issue(2)：1-9,9.

半导体学报（英文版）2016，Vol.37Issue(2)：1-9,9.DOI:10.1088/1674-4926/37/2/021001

Surface acoustic wave devices for sensor applications

Liu Bo ¹Chen Xiao ²Cai Hualin ¹Mohammad Ali Mohammad ²Tian Xiangguang ¹Tao Luqi ²Yang Yi¹

作者信息

1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China
2. Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
折叠

摘要

关键词

surface acoustic wave/sensor/sensor application

Key words

surface acoustic wave/sensor/sensor application

引用本文复制引用

Liu Bo,Chen Xiao,Cai Hualin,Mohammad Ali Mohammad,Tian Xiangguang,Tao Luqi,Yang Yi..Surface acoustic wave devices for sensor applications[J].半导体学报（英文版）,2016,37(2):1-9,9.

基金项目

Project supported by the National Natural Science Foundation of China (Nos.60936002, 61025021, 61434001, 61574083), the State Key Development Program for Basic Research of China (No.2015CB352100), the National Key Project of Science and Technology (No.2011ZX02403-002) and the Special Fund for Agroscientific Research in the Public Interest of China (No.201303107). （Nos.60936002, 61025021, 61434001, 61574083）

半导体学报（英文版）

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ISSN：1674-4926

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