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Effects of reductive annealing on insulating polycrystalline thin films of Nb-doped anatase TiO2: recovery of high conductivity

Shoichiro Nakao Yasushi Hirose Tetsuya Hasegawa

半导体学报（英文版）2016，Vol.37Issue(2)：10-13,4.

半导体学报（英文版）2016，Vol.37Issue(2)：10-13,4.DOI:10.1088/1674-4926/37/2/022001

Effects of reductive annealing on insulating polycrystalline thin films of Nb-doped anatase TiO2: recovery of high conductivity

Shoichiro Nakao ¹Yasushi Hirose ²Tetsuya Hasegawa¹

作者信息

1. Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan
2. Japan Science and Technology Agency, CREST, Bunkyo, Tokyo 113-0033, Japan
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摘要

关键词

transparent conductive oxide/Nb-doped TiO2/pulsed laser deposition

Key words

transparent conductive oxide/Nb-doped TiO2/pulsed laser deposition

引用本文复制引用

Shoichiro Nakao,Yasushi Hirose,Tetsuya Hasegawa..Effects of reductive annealing on insulating polycrystalline thin films of Nb-doped anatase TiO2: recovery of high conductivity[J].半导体学报（英文版）,2016,37(2):10-13,4.

基金项目

This work was partially supported by JSPS KAKENHI Grant Number 15K04687. （）

半导体学报（英文版）

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ISSN：1674-4926

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