红外与毫米波学报2016，Vol.35Issue(1)：6-10,5.DOI:10.11972/j.issn.1001-9014.2016.01.002
利用椭偏仪研究氢气退火处理对ZnO-Ga薄膜光学性能的影响
Optical properties of hydrogenated ZnO-Ga thin films studied by spectroscopic ellipsometry
摘要
关键词
GZO薄膜/氢处理/椭圆偏振光谱仪/双振子模型Key words
GZO thin film/hydrogen treatment/spectroscopic ellipsometry/double oscillator model分类
物理学引用本文复制引用
杨娇,高美珍..利用椭偏仪研究氢气退火处理对ZnO-Ga薄膜光学性能的影响[J].红外与毫米波学报,2016,35(1):6-10,5.基金项目
Supported by the National Natural Science Foundation of China (51371093)and Program for Changjiang Scholars and Innovative Research Team in University(IRT1251) （51371093）
