金刚石与磨料磨具工程Issue(6)：8-13,18,7.DOI:10.13394/j.cnki.jgszz.2015.6.0002
HFCVD 硼掺杂复合金刚石薄膜的机械性能研究
Investigation on mechanical property of HFCVD boron-doped composite diamond film
摘要
Abstract
The composite diamond films combining typical merits of different types of monolayer diamond films show excellent comprehensive performance In this article mechanical properties of UMCD BDMCD UFGCD and two novel boron-doped composite diamond films were respectively evaluated and compared Research results showed that the boron doping technology could significantly improve the film-substrate adhesion so BDM-UMCD and BDM-UM-UFGCD films both presented favorable adhesive strength The surface layer of the BDM-UMCD film was UMCD layer consequently such the composite film had extremely high surface hardness 84 354 GPa similar to the monolayer UMCD film 82 058 GPa relatively high surface roughness R a 304 41 nm and bad polishability By contrast the BDM-UM-UFGCD film with the UFGD layer as the surface performed nice surface smoothness R a 104 71 nm and polishability as well as relatively higher surface hardness 72 657 GPa than the monolayer UFGD film 67 925 GPa attributed to the reinforcement effect of the ultra-hard middle UMCD layer.关键词
HFCVD/硼掺杂/金刚石薄膜/机械性能Key words
HFCVD/boron doping/diamond film/mechanical property分类
化学化工引用本文复制引用
王新昶,申笑天,孙方宏,沈彬..HFCVD 硼掺杂复合金刚石薄膜的机械性能研究[J].金刚石与磨料磨具工程,2015,(6):8-13,18,7.基金项目
国家自然科学基金项目(项目编号51275302、51375011) （项目编号51275302、51375011）
