传感技术学报Issue(12)：1785-1788,4.DOI:10.3969/j.issn.1004-1699.2015.12.009
基于弹性膜片的薄膜溅射式拉力传感器研究
The Research of Sputtering Thin-Film Tension Sensor Based on Elastic Diaphragm
摘要
Abstract
A tension sensor based on an elastic diaphragm is introduced. The sensitive element is thin film resistive of strain gate,which is combined into one body with elastomer by using technique of ion beam sputtering and photo⁃lithography. The basic structure of the sensor and the circuit of zero compensation and signal switching is intro⁃duced in this paper. The simulation and analysis of the elastomer is also carried out. The experimental results show that the sensor can meet the design requirements in full scale. The load of the sensor is 850 N. The sensitivity is bet⁃ter than 0.013 77 mV/N. The safety overload coefficient is about 6.62,which is 2-3 times that of similar tension sen⁃sor. The calibration of the sensor indicates that comprehensive error of the sensor is not greater than 0.013%of the rated output.关键词
弹性膜片/拉力传感器/薄膜电阻应变栅/弹性体Key words
elastic diaphragm/tension sensor/thin film resistive of strain gate/elastomer分类
信息技术与安全科学引用本文复制引用
高阳,李永红,岳凤英,孙玉环,刘期兵,魏坦勇..基于弹性膜片的薄膜溅射式拉力传感器研究[J].传感技术学报,2015,(12):1785-1788,4.基金项目
山西省青年基金 （）
