表面技术Issue(2)：79-83,5.DOI:10.16490/j.cnki.issn.1001-3660.2016.02.012
梯度基体负偏压真空多弧离子镀沉积TiN涂层及其力学性能
Arc Ion Plating with Gradient Bias Voltage Deposition and Mechanical Properties of TiN Coatings
曾华智 1王海 1沈军1
作者信息
- 1. 同济大学 材料科学与工程学院，上海201804
- 折叠
摘要
Abstract
Objective To obtain TiN coatings with excellent comprehensive performance through gradient bias voltage deposi-tion. Methods Gradient TiN coatings were deposited by arc ion plating with gradient bias voltage through 0 V to -180 V. Coating phase structure and morphology were analyzed through X-ray diffraction and scanning electron microscope. The mechanical proper-ties were investigated through nanoindentation and nano-scratch test. Results Compared with the constant bias voltage coatings, the intensity of the (111) peak decreased in the gradient bias voltage coatings. The thickness of the coatings decreased, which indica-ted that the deposition rate was increased. The testing results showed as below. The gradient bias voltage coatings had the Lc2 of 215. 21 mN, the hardness of 31. 2 GPa, the elastic modulus of 498 GPa and the Ly of 81. 65 mN. The constant bias voltage coa-tings had the Lc2 of 248. 63 mN, the hardness of 29. 6 GPa, the elastic modulus of 452 GPa and the Ly of 23. 39 mN. Even though the Lc2 of the gradient bias voltage coatings decreased, the hardness, the elastic modulus and the plasticity increased, and the ( Ly ) increased greatly. A TiN coating with excellent comprehensive performance was achieved. Conclusion The gradient bias voltage deposition method was used to change the single parameter setting. The gradient bias voltage changed the influence of the coating growth continually during deposition, which made the obtained coatings have a gradient change in the structure. Thus, the mechan-ical properties were improved.关键词
多弧离子镀/TiN/梯度涂层/纳米压痕/纳米划痕/力学性能Key words
arc ion plating/TiN/gradient coating/nanoindentation/nano-scratch/mechanical property分类
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曾华智,王海,沈军..梯度基体负偏压真空多弧离子镀沉积TiN涂层及其力学性能[J].表面技术,2016,(2):79-83,5.
