传感技术学报2016，Vol.29Issue(1)：15-20,6.DOI:10.3969/j.issn.1004-1699.2016.01.003
能量平衡法静电驱动柔性振膜微泵特性分析
Analysis on Electrostatically Actuated Diaphragm Micropumpwith Energy Equilibrium Method
摘要
Abstract
The electrostatically actuated flexible diagram pump is analyzed in this paper,it is modeled with the mod-ified energy equilibrium method considering the kinetic energy of the diagram. Energy variation of the pump is also analyzed here. Compared with the results from the minimum energy method,the calculated pressure rise is 87.08 kPa with actuated voltage 300 V,and the pull-in radius of the diagram on the compression chamber is 4.06 mm,the pressure rise is a few higher than the result with the minimum energy method due to the impact of the kinetic energy of the diagram. With the proposed method,some factors,such as diaphragm thickness,dielectric layer thickness and cavity geometric parameters are discussed on the performance of the flexible diagram pump with double-cavity. Moreover,reducing the diagram thickness and its dielectric layer,decreasing the cavity depth and radius is helpful to improve the pressure rise of the micropump.关键词
静电驱动微泵/能量平衡法/柔性薄膜形变Key words
electrostatically actuated micropump/energy equilibrium method/large deformation of round diaphragm分类
机械制造引用本文复制引用
胡院林,梁鑫,王文,张彧..能量平衡法静电驱动柔性振膜微泵特性分析[J].传感技术学报,2016,29(1):15-20,6.基金项目
国家自然科学基金项目(50976067) （50976067）
国家自然科学基金项目(51576123) （51576123）
