传感技术学报2016，Vol.29Issue(1)：21-25,5.DOI:10.3969/j.issn.1004-1699.2016.01.004
低功耗微型磁通门的制备与分析
Fabrication and Analysis of Low Power Micro Fluxgate
摘要
Abstract
To meet the low power consumption demand,the micro fluxgate based porous core was designed and fab-ricated by MEMS technology. Porous thin film core can be effectively used to decrease the power consumption and improve the performance of sensor. By comparing the influence of the aperture ratio of porous core on the exciting current,the optimal parameters are obtained. This parameter can meet the requirement of performance of sensor and meanwhile the requirement of preparation process.关键词
多孔铁芯/微型磁通门/MEMS/低功耗Key words
porous core/micro fluxgate/MEMS/lower power分类
信息技术与安全科学引用本文复制引用
吕辉,李随源..低功耗微型磁通门的制备与分析[J].传感技术学报,2016,29(1):21-25,5.基金项目
高等学校博士学科点专项科研基金项目(20126102110031) （20126102110031）
