激光技术2016，Vol.40Issue(2)：205-208,4.DOI:10.7510/jgjs.issn.1001-3806.2016.02.011
Nd:YAG连续激光诱导下硅中钛过饱和掺杂研究
Study on Si doped with supersaturated Ti induced by continuous wave Nd:YAG laser
摘要
Abstract
In order to prepare Si with supersaturated transition metal , a self-designed linear high power Nd:YAG continuous wave laser was used to irradiate a Si wafer sputtered a layer of Ti .Then the sample was measured by Auger electron spectroscopy and the thermal field was simulated based on the 2-D thermodynamic model . The experimental results indicate that the concentration of Ti in Si is much larger than the solid solubility of Ti in Si and the position of the maximum concentration of the Ti is below the surface of the sample .The maximum temperature is not at the top surface of the sample .Temperature distribution directly leads to the maximum temperature of Si wafer below the top surface of the sample .The simulation results are in good agreement with the experiment results .The saturated transition metal can be supersaturated by irradiating and scanning the material surface with a linear continuous wave laser .关键词
激光技术/Nd:YAG激光器/硅材料/线形光斑/钛掺杂/过饱和Key words
laser technique/Nd:YAG laser/Si material/line shape spot/Ti doping/supersaturation分类
信息技术与安全科学引用本文复制引用
范宝殿,陈蓉,庞爱锁,陈朝..Nd:YAG连续激光诱导下硅中钛过饱和掺杂研究[J].激光技术,2016,40(2):205-208,4.基金项目
国家自然科学基金资助项目(61076056) （61076056）
