电子器件Issue(1)：21-25,5.DOI:10.3969/j.issn.1005-9490.2016.01.005
140 GHz空腔滤波器设计及加工工艺研究
The Design of Cavity Filter at 140 GHz and Study on Processing Technology
摘要
Abstract
A rectangular waveguide cavity filter of D band was designed and achieved with inductor diaphragm cou⁃pling by adopting electric spark micro-machining technology. Using the equivalent circuit method a rectangular cav⁃ity filter at 140 GHz was designed. The influence of the cavity number on the main performance of the filter was an⁃alyzed. A four order cavity filter with excellent performance was designed successfully. The center frequency is (140±3)GHz,the insertion loss is within-3 dB,the return loss is below-20 dB. The prototypes were fabricated us⁃ing electric spark micro-machining technology,the bonding technique was employed for the fabrication of filter. The electric spark micro-machining cavity filter with a center frequency of(138.5±3)GHz,insertion loss of-4.4 dB, the test results showed the filter has the band-pass characteristics and filter function in 140 GHz. In the case of con⁃sidering the machining error and fixture loss,the main technique indexes basically accord with the design values.关键词
滤波器/空腔/毫米波/太赫兹/全波仿真/电火花微加工Key words
filter/cavity/millimeter wave/THz/HFSS/electric spark micro-machining分类
信息技术与安全科学引用本文复制引用
甯彪,缪旻..140 GHz空腔滤波器设计及加工工艺研究[J].电子器件,2016,(1):21-25,5.基金项目
国家自然科学基金项目（61176102，60976083，60501007）；国家重大科技专项基金项目（2009ZX02038）；北京市属高等学校人才强教计划项目（PHR201108257）；北京市属高等学校高层次人才引进与培养计划项目 （）
