电子器件Issue(1)：124-127,4.DOI:10.3969/j.issn.1005-9490.2016.01.025
基于外差干涉的激光超声检测技术
Laser Ultrasonic Displacement Detection Technology Based on Heterodyne Interference
摘要
Abstract
Laser ultrasonic vibration displacement is in the nanometer level. In order to detect weak signal of laser ultrasonic,heterodyne interferometer system requires higher sensitivity. In order to improve the measurement preci⁃sion,the optical path has been improved. The double light path heterodyne interferometer enhances anti-interfer⁃ence capability of system,the lens are used to enhance the light gathering power of the interferometer,Increasing the flux of interferometer,so it can improve the precision of measurement. The filter is installed in front of photoelec⁃tric detector,filter thestray light and improve the system signal-to-noise ratio. By high-frequency ultrasonic experi⁃mental verification,the displacement resolution of the system can reach 0.1 nm.关键词
纳米位移/外差干涉/激光超声/聚焦Key words
Nanometer displacement/Heterodyne interferometer/Laser ultrasound/Focusing分类
信息技术与安全科学引用本文复制引用
司高潞,张志伟..基于外差干涉的激光超声检测技术[J].电子器件,2016,(1):124-127,4.基金项目
山西省自然科学基金项目 （）
