分子力对机电耦合薄膜压力敏感元件振动的影响OA北大核心CSTPCD
Influence of molecular forces on dynamic characteristic of electromechanical coupling thin film pressure sensitive element
本文将薄膜式微谐振压力传感器谐振子简化为对边简支对边自由机电耦合微薄膜谐振系统,给出了考虑分子力作用时微薄膜压力敏感元件机电耦合系统动力学方程,推导其振型方程及频率方程,研究了分子力对系统固有频率及自由振动的影响规律. 结果表明:分子力对于机电耦合微薄膜的自由振动固有频率具有重要的影响. 随着系统初始间隙的减小、工作电压的增大、微薄膜厚度的减小以及薄膜长度的增大,分子力对系统固有频率的影响更加显著. 在低阶模态下,分子力对固有频率的影响变大,应该…查看全部>>
The dynamical equations of electromechanical coupling thin film are deduced by considering molecular forces.The vibra-tion and frequency equations of thin film with two opposite edges simply supported and other two free are derived. Using the equa-tions, the influences of the molecular forces on natural frequency and free vibration are investigated. Results show:the molecular forces have obvious influences on the natural frequency. As the initial clearance d…查看全部>>
孙丽波;许立忠;丁玲
燕山大学 环境与化学工程学院,河北 秦皇岛066004燕山大学 机械工程学院,河北 秦皇岛066004燕山大学 信息科学与工程学院,河北 秦皇岛066004
机械制造
对边简支对边自由机电耦合微薄膜vanderWaals力Casimir力MEMS
two opposite edges simply supported and other two freeelectromechanical coupledthin filmvan der Waals forceCasimir forceMEMS
《燕山大学学报》 2015 (6)
机电集成压电谐波传动系统
523-530,8
国家自然科学基金资助项目( 51275441 )河北省科学技术研究与发展计划资助项目(13961701D)河北省教育厅科学研究计划(Z2012031)
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