半导体学报（英文版）2016，Vol.37Issue(3)：122-127,6.DOI:10.1088/1674-4926/37/3/036002
Molecular dynamic simulation of non-melt laser annealing process
Molecular dynamic simulation of non-melt laser annealing process
Yan Liren 1Li Dai 1Zhang Wei 1Liu Zhihong 1Zhou Wei 2Wang Quan2
作者信息
- 1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China
- 2. Shanghai Integrated Circuit Research & Development Center, Shanghai 201210, China
- 折叠
摘要
关键词
laser anneal/molecular dynamic simulation/impurity redistributationKey words
laser anneal/molecular dynamic simulation/impurity redistributation引用本文复制引用
Yan Liren,Li Dai,Zhang Wei,Liu Zhihong,Zhou Wei,Wang Quan..Molecular dynamic simulation of non-melt laser annealing process[J].半导体学报（英文版）,2016,37(3):122-127,6.
