表面技术2016，Vol.45Issue(3)：72-77,6.DOI:10.16490/j.cnki.issn.1001-3660.2016.03.012
甲烷体积分数对纳米金刚石薄膜形貌的影响
Effect of Methane Volume Fraction on the Morphology of Nanocrystalline Diamond Films
摘要
Abstract
ABSTRACT:Objective To study the effect of different methane volume fractions on the growth of nanocrystalline diamond films, and to realize the preparation of NCD thin films with smaller grain size and high flatness. Methods Nanocrystalline diamond thin films were prepared by microwave plasma enhanced chemical vapor deposition method. The effects of different volume fractions of methane on the grain size, surface morphology and surface roughness of nanocrystalline diamond films were discussed with CH4/H2 as the gas source and other conditions kept constant during the growth period. The surface morphology and grain size of nanocrystal-line diamond films were observed by SEM and XRD, and the scattering peaks were analyzed by Raman. Results With the increase of methane volume fraction, the grain size of the films decreased. At low methane volume fraction, the crystal shape was complete, but less dense, while at high methane volume fraction, the crystal shape was disorganized, but the density was higher. When the methane volume fraction was 9%, the minimal average particle size of 21. 3 nm was reached, the surface roughness was good, but the quality of NCD films became poor, with massive generation of amorphous diamond components. At a methane volume fraction of 8%, the morphology was the best, and the minimum surface roughness was less than 20 nm. The Raman analysis showed that sili-con peak and graphene characteristic peaks occurred in the NCD films. Conclusion Methane volume fraction had a great effect on the quality of the nanocrystalline diamond films. The methane volume fraction of 8% was the dividing point of surface flatness changing from poor to good and then again changing gradually poor. Under this condition, the average grain size was 23. 6 nm, and the film surface was smooth.关键词
纳米金刚石薄膜/MPCVD/晶粒尺寸/表面粗糙度/甲烷体积分数/表面形貌Key words
nanocrystalline diamond film/MPCVD/grain size/surface roughness/methane volume fraction/surface mor-phology分类
矿业与冶金引用本文复制引用
熊礼威,彭环洋,汪建华,崔晓慧,龚国华..甲烷体积分数对纳米金刚石薄膜形貌的影响[J].表面技术,2016,45(3):72-77,6.基金项目
国家自然科学基金项目(51402220) （51402220）
武汉工程大学青年基金项目(Q201501)@@@@Supported by the National Natural Foundation of China(51402220) and Wuhan Institute of Technology Youth Fund Project(Q201501) （Q201501）
