传感技术学报2016，Vol.29Issue(2)：161-165,5.DOI:10.3969/j.issn.1004-1699.2016.02.002
基于V-F变换的硅压阻压力传感器的处理电路
A Voltage-Frequency Conversion Based Signal Conditioning Circuit of Silicon Piezo-Resistive Pressure Sensor
摘要
Abstract
A temperature self-compensation method based on bridge parameters is proposed for silicon piezo-resis⁃tive pressure sensors in this paper. A high-precision processing circuit with differential input and dual parameters output is designed to measure bridge parameters. The circuit is a charge-balanced differential input V-F converter built by simple components. Bridge parameters are calculated by output frequency of different circuit configuration. The circuit eliminates the common mode voltage error and the reference frequency affect by differential input and reference resistance respectively. The final output frequency is related to the quantity to be measured and the refer⁃ence resistor. It is confirmed by experiment that the measured accuracy of the bridge resistors can reach 0.006 8%and the whole pressure sensors’precise is 0.039%after compensation,which demonstrates that this method can im⁃prove the measurement precision by one order of magnitude.关键词
硅压阻压力传感器/温度自补偿/V-F变换/电桥电阻/电荷平衡Key words
silicon piezo-resistive pressure sensors/temperature self-compensation/Voltage-Frequency conversion/bridge resistance/charge balance分类
信息技术与安全科学引用本文复制引用
张燕琴,邢维巍,景标..基于V-F变换的硅压阻压力传感器的处理电路[J].传感技术学报,2016,29(2):161-165,5.基金项目
国家高技术研究发展计划项目 （）
