传感技术学报2016，Vol.29Issue(2)：166-170,5.DOI:10.3969/j.issn.1004-1699.2016.02.003
一种采用穴番-A敏感膜的新型声表面波瓦斯传感器的研究
A Novel Surface Acoustic Wave Methane Sensor Coated with Cryptophane-A
摘要
Abstract
Utilizing the supramolecular compound cryptophane-A’s specific absorption to methane molecules,a novel room-temperature SAW methane sensor covered with cryptophane-A film is proposed. A 300 MHz SAW reso⁃nator with low insertion loss and high quality factor is designed. Two-channel differential oscillator using SAW reso⁃nators as feedback elements is fabricated.The film deposition on the SAW resonator is completed by drop-coating and spin-coating method respectively. Experiments have been conducted to study the response to 5% methane of sensors coated via two coating methods. The results show that the response of drop-coated sensors achieves 1 kHz, much larger than spin-coated ones. The surface topography via AFM illustrates that the surface roughness of sensing films is the main cause of the difference. The sensor’s response to various methane concentrations is also studied. The result demonstrates that the sensor’s response and methane concentrationare in approximatelinear relationship. The measured detection sensitivity is 205 Hz/%,and the detection limit is about 0.2%.关键词
声表面波/瓦斯传感器/穴番-A/表面粗糙度Key words
surface acoustic wave/gas sensor/cryptophane-A/surface roughness分类
信息技术与安全科学引用本文复制引用
胡浩亮,王文,何世堂,潘勇,张彩红,董川..一种采用穴番-A敏感膜的新型声表面波瓦斯传感器的研究[J].传感技术学报,2016,29(2):166-170,5.基金项目
国家自然科学基金项目 （）
