传感技术学报2016，Vol.29Issue(2)：171-176,6.DOI:10.3969/j.issn.1004-1699.2016.02.004
四元阵型MEMS矢量水听器微结构设计
Design of Four-Element Array MEMS Vector Hydrophone
摘要
Abstract
To solve the existence problem of port/starboard blur when using single MEMS vector hydrophone,a new four-element array MEMS vector hydrophone microstructure has been presented. Firstly,the cause of port/starboard blur of the current MEMS vector hydrophone was analyzed theoretically and a novel four-element array microstruc⁃ture was proposed,which can solve the problem of port/starboard blur. Secondly,the function of novel microstruc⁃ture was verified through finite element method,which shown that the direction of sound source could be ascer⁃tained accurately. Finally,environmental test wasdone using the standing wave tube,and the results show that the four-element array microstructure can help to deal with the challenging of port/starboard blur.关键词
MEMS/左右舷模糊/Ansys/矢量水听器Key words
MEMS/port/starboard blur/Ansys/vector hydrophone引用本文复制引用
郭静,张国军,刘源,王续博,张文栋..四元阵型MEMS矢量水听器微结构设计[J].传感技术学报,2016,29(2):171-176,6.基金项目
应用于海底长期观测网的纳机电矢量水听器项目(2013AA09A412)；基于纳机电矢量水听器面阵的水下目标成像机理技术研究项目(61127008/F040703) （2013AA09A412）
