传感技术学报2016，Vol.29Issue(2)：182-187,6.DOI:10.3969/j.issn.1004-1699.2016.02.006
基于Z-力敏元件的测力研究
Research on Testing Force Based on Z-Sensitive Element
摘要
Abstract
Since Z-sensitive element is a semiconductor element that exists dispersion,nonlinearity,temperature characteristics,zero drift characteristics,the amount of output frequency are correspondence to strain of the pres⁃sure,it can be applied only after compensation. The characteristics above of the Z-force-sensitive components were researched in this paper. The dispersion and nonlinear of the force-sensitive element is solved by cubic spline inter⁃polation method. The temperature characteristics exist is solved by quadratic interpolation method. The zero drift characteristics are solved by lock method through program. Experiments show that through digitization compensated Z-force-sensitive components the output frequency of the test system can directly proportional to the measured pres⁃sure strain. The research results lay a foundation for practical application of Z-force-sensitive element.关键词
压力传感器/非线性补偿/温度补偿/零点漂移Key words
pressure sensors/nonlinear compensation/temperature compensation/zero drift分类
信息技术与安全科学引用本文复制引用
江东,单薏,刘绪坤,杨嘉祥,王德玉..基于Z-力敏元件的测力研究[J].传感技术学报,2016,29(2):182-187,6.基金项目
国家自然科学基金项目 （）
