强激光与粒子束2016，Vol.28Issue(6)：064106-1-064106-5,5.DOI:10.11884/HPLPB201628.064106
环形静电排斥旋转驱动器微光机电系统微镜
Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator
摘要
Abstract
The micro-opto-electro-mechanical systems (MOEMS)mirror is an important optical device in laser display, light beam scanning,and adaptive optics applications.MOEMS mirrors are mostly attractive electrostatically actuated in the re-ported literatures,which are troubled by the pull-in effect.Additionally,the mismatch of square actuators and circular mirror will make the fill factor much lower.A MOEMS mirror based on electrostatic repulsive circular actuator and surface fabrication process is proposed in this paper.Arranged like a ring around,the actuator matches well with the circular mirror.The designed MOEMS mirror has an aperture of 204 μm,and is fabricated by polycrystalline silicon multi-users-MEMS-processes (Poly-MUMPs)process.Simulation and experimental results show that the mirror has a maximum rotation angle of 0.62°,a response time of 494 μs and an operation bandwidth of 1.1 91 kHz,and is suitable for the common beam scanning applications.关键词
微光机电系统/微镜/表面工艺/静电排斥/环形驱动器/旋转角Key words
micro-opto-electro-mechanical systems/micro mirror/surface micromachining/electrostatic repulsive/circular actuator/rotation angle分类
信息技术与安全科学引用本文复制引用
马文英,魏耀华,汪为民,王强..环形静电排斥旋转驱动器微光机电系统微镜[J].强激光与粒子束,2016,28(6):064106-1-064106-5,5.基金项目
国家自然科学基金项目(11403029) （11403029）
中国科学院青年创新促进会资助项目(2014346) （2014346）
四川省科技创新苗子工程资助项目(2015064) （2015064）
成都信息工程大学科研基金项目(J201505) （J201505）
