强激光与粒子束2016，Vol.28Issue(6)：064119-1-064119-6,6.DOI:10.11884/HPLPB201628.064119
石英音叉温度频率特性的温度传感器
Temperature-frequency characteristics of quartz tuning fork for temperature sensing
摘要
Abstract
A quartz tuning fork (QTF)micro-resonant temperature sensor which employs the shifting fre-quency corresponding to temperature is developed for high performance temperature measurement.The sensor is designed by the theoretical analysis,and the finite element simulation is employed to optimize the structure parameters.Micromachining technology is adopted in the fabrication of the QTF resonator using photolithogra-phy and etching technology.Performances of the QTF temperature sensor prototypes are experimentally inves-tigated.Experimental results show that the resonance frequency of the QTF temperature sensor is approximate-ly 36.545 kHz and the sensitivity is - 1.9 Hz/℃ in the operating range of -20-100 ℃,with a non-linearity less than 0.18% and a hysteresis of 0.02%,which are in good agreement with analytical calculation results. Due to the excellent performances such as high accuracy,high sensitivity,low power and low cost,this QTF temperature sensor provides a commendable solution for high performance temperature measurement.关键词
石英音叉/温度频率特性/微机械技术/有限元仿真/温度传感器Key words
quartz tuning fork/temperature-frequency characteristic/micromachining technology/finite element simulation/temperature sensor分类
信息技术与安全科学引用本文复制引用
徐军,刘春花,马静,李欣..石英音叉温度频率特性的温度传感器[J].强激光与粒子束,2016,28(6):064119-1-064119-6,6.基金项目
supported by National Natural Science Foundation of Heilongjiang Province (F201308 and F201136) （F201308 and F201136）
