强激光与粒子束2016，Vol.28Issue(6)：064133-1-064133-5,5.DOI:10.11884/HPLPB201628.064133
薄膜体声波谐振器性能模型参数的提取方法
Method for extracting parameters of performance model of thin film bulk acoustic wave resonator
摘要
Abstract
The thin film bulk acoustic resonator (FBAR)performance model contains two relationships:one is the relation-ship between the effective electromechanical coupling coefficient and the shape factor (ratio of area and perimeter)of FBAR,the other is the relationship between the quality factor and the shape factor.The parameter in the former is the equivalent width of re-gion at the edge of FBAR.The parameter in the latter is the transmission coefficient of lateral acoustic energy in FBAR.In order to make the FBAR performance model be applied for different film structure,materials and process technology of FBAR,a new procedure for extracting the parameters of FBAR performance model was proposed.In the case of 5 layers composite structure FBAR,several FBARs with the same film structure and different shape factor were fabricated on the same wafer.According to one of the FBARs,the effective electromechanical coupling coefficient and the quality factor were simulated by Mason circuit mod-el and measured by vector network analyzer and RF probe station.The two parameters in FBAR performance model were solved by taking these values into the two relationships.After determining the parameters,the FBAR performance model was used to predict the effective electromechanical coupling coefficient and the quality factor of other FBARs on wafer.Compared to measured value,the relative error of prediction values is within 3%,which verifies the validity of the procedure for extracting parameters.关键词
薄膜体声波谐振器/性能模型/形状因子/有效机电耦合系数/品质因数Key words
FBAR/performance model/shape factor/effective electromechanical coupling coefficient/quality factor PACS：06.90.+v/85.85.+j/87.80.Ek分类
信息技术与安全科学引用本文复制引用
蔡洵,高杨,黄振华..薄膜体声波谐振器性能模型参数的提取方法[J].强激光与粒子束,2016,28(6):064133-1-064133-5,5.基金项目
国家自然科学基金项目（61574131）；中国工程物理研究院超精密加工技术重点实验室重大基金项目（2014ZA001）；西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目（14zxtk01）；重庆大学新型微纳器件与系统技术国防重点学科实验室访问学者基金项目（2013MS04）；中国工程物理研究院电子工程研究所创新基金项目（S20141203）；西南科技大学研究生创新基金项目 （）
