高电压技术2016，Vol.42Issue(3)：673-684,12.DOI:10.13336/j.1003-6520.hve.20160308006
微放电及其应用
Micro-discharge and Its Applications
摘要
Abstract
Micro-discharge happens in a limited space.The gap spacing has the magnitude of sub-millimeters or below.Compared with the traditional gas discharge, micro-discharge has some unique characteristics due to the micro-scale and hence attracts a great amount of interest.On one hand, the micro-discharge system is easy to be miniaturized thus having great potential in applications such as biomedicine, micro-region thermal cooling, micro-electro-mechanical system, ionic blower, electrostatic-fluid accelerator, gas sensor, ion sources, liquid discharge technic, and electrostatic detection.On the other hand, accompanying with the rapid development of integrated circuits, micro-electronics technology and micro-electro-mechanical systems, the dimension of the conductor electrodes as well as the gap spacing between them has been sharply reduced.A possible risk comes from electrostatic discharge under low voltage breakdown that could turn to a hazard source for micro-electronics, initiate explosive materials or devices as well as electric power system.We review and summarize numerous experimental, computational and analytical works on micro-discharge and micro-plasma in recent years, and introduce progress in understanding the mechanisms and physics of micro-discharge and in the applications.关键词
气体放电/微放电/微等离子体/击穿特性/场致发射/帕邢曲线Key words
gas discharge/micro-discharge/micro-plasma/breakdown characteristics/field emission/Paschen's curve引用本文复制引用
欧阳吉庭,张宇,秦宇..微放电及其应用[J].高电压技术,2016,42(3):673-684,12.基金项目
国家自然科学基金(11475019 （）
11005009).Project supported by National Natural Science Foundation of China (11475019, 11005009). （11475019, 11005009）
